JPS63143876A - 太陽電池の製造方法 - Google Patents

太陽電池の製造方法

Info

Publication number
JPS63143876A
JPS63143876A JP61290421A JP29042186A JPS63143876A JP S63143876 A JPS63143876 A JP S63143876A JP 61290421 A JP61290421 A JP 61290421A JP 29042186 A JP29042186 A JP 29042186A JP S63143876 A JPS63143876 A JP S63143876A
Authority
JP
Japan
Prior art keywords
oxide film
solar cell
junction
electrode
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61290421A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466393B2 (en]
Inventor
Koichi Suda
晃一 須田
Yasuhiro Kida
康博 木田
Kunihiro Matsukuma
邦浩 松熊
Keiichi Morita
守田　啓一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61290421A priority Critical patent/JPS63143876A/ja
Publication of JPS63143876A publication Critical patent/JPS63143876A/ja
Publication of JPH0466393B2 publication Critical patent/JPH0466393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP61290421A 1986-12-08 1986-12-08 太陽電池の製造方法 Granted JPS63143876A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61290421A JPS63143876A (ja) 1986-12-08 1986-12-08 太陽電池の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61290421A JPS63143876A (ja) 1986-12-08 1986-12-08 太陽電池の製造方法

Publications (2)

Publication Number Publication Date
JPS63143876A true JPS63143876A (ja) 1988-06-16
JPH0466393B2 JPH0466393B2 (en]) 1992-10-23

Family

ID=17755811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61290421A Granted JPS63143876A (ja) 1986-12-08 1986-12-08 太陽電池の製造方法

Country Status (1)

Country Link
JP (1) JPS63143876A (en])

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100543535B1 (ko) * 2003-05-07 2006-01-20 준 신 이 누설전류 저감 기법을 이용한 다결정 실리콘 태양전지의 제조방법
WO2007079795A1 (de) * 2005-12-23 2007-07-19 Infineon Technologies Austria Ag Verfahren zur herstellung einer solarzelle und solarzelle
US8871619B2 (en) 2008-06-11 2014-10-28 Intevac, Inc. Application specific implant system and method for use in solar cell fabrications
US8997688B2 (en) 2009-06-23 2015-04-07 Intevac, Inc. Ion implant system having grid assembly
US9318332B2 (en) 2012-12-19 2016-04-19 Intevac, Inc. Grid for plasma ion implant
US9324598B2 (en) 2011-11-08 2016-04-26 Intevac, Inc. Substrate processing system and method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100543535B1 (ko) * 2003-05-07 2006-01-20 준 신 이 누설전류 저감 기법을 이용한 다결정 실리콘 태양전지의 제조방법
WO2007079795A1 (de) * 2005-12-23 2007-07-19 Infineon Technologies Austria Ag Verfahren zur herstellung einer solarzelle und solarzelle
US8871619B2 (en) 2008-06-11 2014-10-28 Intevac, Inc. Application specific implant system and method for use in solar cell fabrications
US8997688B2 (en) 2009-06-23 2015-04-07 Intevac, Inc. Ion implant system having grid assembly
US9303314B2 (en) 2009-06-23 2016-04-05 Intevac, Inc. Ion implant system having grid assembly
US9741894B2 (en) 2009-06-23 2017-08-22 Intevac, Inc. Ion implant system having grid assembly
US9324598B2 (en) 2011-11-08 2016-04-26 Intevac, Inc. Substrate processing system and method
US9875922B2 (en) 2011-11-08 2018-01-23 Intevac, Inc. Substrate processing system and method
US9318332B2 (en) 2012-12-19 2016-04-19 Intevac, Inc. Grid for plasma ion implant
US9583661B2 (en) 2012-12-19 2017-02-28 Intevac, Inc. Grid for plasma ion implant

Also Published As

Publication number Publication date
JPH0466393B2 (en]) 1992-10-23

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